All The Claims

1. A method of forming an underground slurry wall comprising the steps of:
providing a trencher having a trenching arm assembly with a cutting tooth track;
providing a dispensing tube proximate the cutting tooth track;
rotating the cutting tooth track;
extending the cutting tooth track below the outside surface, to, in turn, agitate the soil therebelow to a predetermined depth;
translating the trenching arm assembly across the outside surface so as to form an underground wall of agitated soil;
dispensing a clay-like material proximate the cutting tooth track; and
utilizing the cutting tooth track to mix the clay-like material into the soil while the cutting tooth track is rotating and translating, to, in turn, mix the clay-like material into the agitated soil.
2. The method of forming an underground slurry wall of claim 1 wherein the clay-like material comprises bentonite.
3. The method of forming an underground slurry wall of claim 1 further comprising the steps of:
providing a storage container with the clay-like material remote of the trenching arm; and
feeding the clay-like material from the remote storage container to the dispensing tube at a predetermined rate.
4. The method of forming an underground slurry wall of claim 3 wherein the trencher further includes a cab spaced apart from the trenching arm, the storage container being coupled to the cab of the trencher.
5. The method of forming an underground slurry wall of claim 3 wherein the step of feeding the clay-like material from the remote storage container further comprises the step of feeding the clay-like material through at least one flexible tube having a flexible auger positioned therein.
6. The method of forming an underground slurry wall of claim 1 wherein the step of dispensing the clay-like material further comprises the steps of controlling the rate of flow of the clay-like material from within the dispensing tube.
7. The method of forming an underground slurry wall of claim 6 wherein the step of dispensing the clay-like material further comprises the step of providing an outside fluid to the clay-like material.
8. The method of forming an underground slurry wall of claim 7 wherein the outside fluid comprises water.
9. A system for forming an underground slurry wall comprising:
a trencher having a body, a boom pivotably coupled to and extending from the body and a trenching arm assembly pivotably coupled to and extending from the boom opposite the body;
a material transport assembly having a distribution manifold spaced apart from the trenching arm;
a material delivery assembly having a dispenser tube with a second end positioned adjacent the trenching arm, such that material dispensed from the second end can be mixed by the trenching arm during operation; and
a transport tube assembly extending from the distribution manifold to the dispenser tube, the transport tube assembly configured to direct a clay-like material from the collection manifold to the dispenser tube during operation of the trenching arm, to, in turn, supply a clay-like material to the trenching arm during operation.
10. The system of claim 9 wherein the material transport assembly further includes a collection manifold positioned adjacent to the trenching arm assembly, the collection manifold including an inlet coupled to the tube transport assembly, and an outlet coupled to the dispensing tube.
11. The system of claim 10 wherein the transport tube assembly further comprises at least one outer flexible tube, having an inner flexible auger extending therethrough, and a motor drive coupled to the flexible auger, configured to rotate the flexible auger within the outer flexible tube, to, in turn, direct the clay-like material from the distribution manifold to the collection manifold.
12. The system of claim 11 wherein the at least one outer flexible tube comprises at least four outer flexible tubes, each of which includes an inner flexible auger extending therethrough, coupled to a motor drive.
13. The system of claim 12 further comprising a controller coupled to the motor drive, the controller configured to control the speed of the motor drive, and in turn, the auger coupled thereto.
14. The system of claim 12 wherein the dispensing tube further includes an auger extending therethrough, and a feed mixing tube positioned so as to be in fluid communication therewith, the transport tube assembly being coupled to the feed mixing tube, with the auger coupled to a motor.
15. The system of claim 14 further comprising a controller coupled to the motor, to, in turn, control the speed of the motor and the speed of the auger.
16. A system for forming an underground slurry wall comprising:
a trencher having a body, a boom pivotably coupled to and extending from the body and a trenching arm assembly pivotably coupled to and extending from the boom opposite the body;
a material transport assembly positioned proximate the trenching arm assembly, the material transport assembly having a cavity and an auger positioned proximate a lower end of the cavity; and
a material delivery assembly having a dispenser tube with a second end positioned adjacent the trenching arm, such that material dispensed from the second end can be mixed by the trenching arm during operation, and a feed mixing tube in fluid communication with the dispenser tube spaced apart from the second end, the auger of the material transport assembly coupled to the feed mixing tube, to, in turn, direct a clay-like material from the cavity to the dispenser tube during operation of the trenching arm, to, in turn, supply a clay-like material to the trenching arm during operation.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A system for presenting network hotspot information, which comprises:
a web page capturing module configured to capture a web page containing network hotspot information on a current network;
a web page analyzing module configured to analyze the web page to acquire body information of the web page;
a region identification module configured to perform region identification on the body information to acquire a region which the body information belongs to and perform quantity statistics on the web pages belonging to the same region; and
a presenting module configured to present a result of the quantity statistics in a manner of map coloring.
2. The system according to claim 1, wherein, the system further comprises:
a storage module configured to store data of the body information; and
a formatting unit configured to format the body information.
3. (canceled)
4. The system according to claim 1, wherein, the region identification module further comprises:
a Trie tree construction submodule configured to construct a Double Array Trie tree with a statistical table of administrative regions;
a matching submodule configured to match geographical names occurring in the body information with the Double Array Trie tree;
a region acquisition submodule configured to utilize a result of matching to acquire the region which the body information belongs to.
5. (canceled)
6. The system according to claim 4, wherein, the result of matching comprises: geographical names, occurrence frequency of the geographical names and the administrative relation between the geographical names.
7. The system according to claim 1, wherein, the web page capturing module uses a web crawler to capture the web page containing network hotspot information on the current network.
8-9. (canceled)
10. The system according to claim 1, wherein, the web page analyzing module further comprises: a multi-dimensional extraction submodule configured to perform a multi-dimensional extraction on the web page to acquire the body information of the web page.
11. The system according to claim 5, wherein, the presenting module further comprises: a result hashing submodule configured to hash a result of the statistics data over a range of color levels to realize the map coloring.
12. The system according to claim 5, wherein, the presenting module further comprises: a scaling submodule configured to adjust different administrative levels of regions in the map for display as required.
13. The system according to claim 1, wherein, the system further comprises: a learning module configured to use a support vector machine (SVM) based machine to learn until a preset accuracy is reached after a large amount of samples are manually marked and corrected.
14. A method for presenting network hotspot information, comprising steps of:
capturing a web page containing network hotspot information on a current network;
analyzing the web page to acquire body information of the web page;
performing region identification on the body information to acquire a region which the body information belongs to and performing quantity statistics on the web pages belonging to the same region; and
presenting a result of the quantity statistics in a manner of map coloring.
15. The method according to claim 14, wherein, formatting the body information and storing data of the body information before performing the region identification on the body information.
16. (canceled)
17. The method according to claim 14, wherein, the step of performing the region identification on the body information further comprises:
utilizing a statistical table of the administrative regions to construct a Double Array Trie tree;
matching geographical names occurring in the body information with the Double Array Trie tree;
utilizing a result of matching to acquire the region which the body information belongs to.
18. (canceled)
19. The method according to claim 17, wherein, the result of matching comprises: geographical names, occurrence frequency of the geographical names and the administrative relation between the geographical names.
20. The method according to claim 14, wherein, a web crawler is used to capture the web page containing network hotspot information on the current network.
21-22. (canceled)
23. The method according to claim 14, wherein, when the web page is analyzed, a multi-dimensional extraction is performed on the web page to acquire the body information of the web page.
24. The method according to claim 14, wherein, when the result of the quantity statistics is presented in a manner of map coloring, the result of the statistics data is hashed over a range of color levels to realize the map coloring.
25. The method according to claim 14, wherein, when the result of the quantity statistics is presented in a manner of map coloring, different administrative levels of regions in the map are adjusted for display as required.
26. The method according to claim 14, wherein, before the region identification is performed on the body information and after a large amount of samples are manually marked and corrected, a support vector machine (SVM) based machine is used to learn until a preset accuracy is reached.
27. (canceled)
28. A non-transitory computer readable medium having instructions stored thereon that, when executed by at least one processor, cause the at least one processor to perform operations for presenting network hotspot information comprising:
capturing a web page containing network hotspot information on a current network;
analyzing the web page to acquire body information of the web page;
performing region identification on the body information to acquire a region which the body information belongs to and performing quantity statistics on the web pages belonging to the same region; and
presenting a result of the quantity statistics in a manner of map coloring.

What is claimed is:

1. A method of producing a print medium that exhibits reduced bronzing comprising incorporating an additive into the print medium, wherein the additive increases a pH of the print medium.
2. The method of claim 1, wherein incorporating an additive into the print medium comprises incorporating an organic base or an inorganic base into the print medium.
3. The method of claim 1, wherein incorporating an additive into the print medium comprises incorporating the additive into a photographic print medium.
4. The method of claim 1, wherein incorporating an additive into the print medium comprises incorporating the additive into a wash coat.
5. The method of claim 1, wherein incorporating an additive into the print medium comprises mixing the additive into a coating formulation of the print medium.
6. The method of claim 1, wherein incorporating an additive into the print medium comprises incorporating at least one of 4-morpholineethane-sulfonic acid; bis(2-hydroxyethyl)imino-tris(hydroxymethyl)methane; N-(2-acetamido)imino-diacetic acid; N-(2-acetamido)-2-aminoethanesulfonic acid; piperazine-N,N-bis(2-ethanesulfonic acid); beta-hydroxy-4-morphol inepropanesulfonic acid; 1,3-bis(tris(hydroxymethyl)methylamino)-propane; N,N-bis(2-hydroxyethyl)-2-aminoethanesulfonic acid; 4-(N-morpholino)butanesulfonic acid; N-tris(hydroxymethyl)methyl-2-aminoethane sulfonic acid); N-(2-hydroxyethyl)piperazine-N-2-ethanesulfonic acid; N,N-bis(2-hydroxyethyl)-3-amino-2-hydroxypropanesulfonic acid; 4-morpholinepropanesulfonic acid; 3-(N-tris(hydroxymethyl )methylamino)-2-hydroxypropane-sulfonic acid; tris(hydroxymethyl)aminomethane; N-(2-hydroxyethyl)piperazine-N-(2-hydroxypropane-sulfonic acid)); piperazine-N,N-bis(2-hydroxypropanesulfonic acid)); triethanolamine; N-(2-hydroxyethyl)piperazine-N-(3-propanesulfonic acid); N-(tris(hydroxymethyl)methyl)glycine; glycyl-glycine; N,N-bis(2-hydroxyethyl)glycine; N-(2-hydroxyethyl)piperazine-N-(4-butanesulfonic acid); ((2-hydroxy-1,1-bis(hydroxymethyl)ethyl)amino)-1-propanesulfonic acid; 2-amino-2-methyl-1,3-propanediol; N-tris-(hydroxymethyl)methyl-4-aminobutanesulfonic acid; 3-((1,1-dimethyl-2-hydroxyethyl)amino)-2-hydroxypropanesulfonic acid; 2-(cyclohexylamino)ethanesulfonic acid; 3-(cyclohexylamino)-2-hydroxy-1-propanesulfonic acid; 2-amino-2-methylpropanol; 3-cyclohexylamino-1-propanesulfonic acid; 4-cyclohexylamino-1-butanesulfonic acid; sodium acetate; or sodium succinate into the print medium.
7. The method of claim 1, wherein incorporating an additive into the print medium comprises incorporating at least one of sodium bicarbonate, sodium carbonate, sodium borate, sodium phosphate, sodium acetate, sodium sulfite, sodium bisulfite, or sodium hydroxide into the print medium.
8. The method of claim 1, wherein incorporating an additive into the print medium comprises incorporating the additive into the print medium in an amount from approximately 0.001% by weight to approximately 20% by weight of a total coating formulation of the print medium.
9. The method of claim 1, wherein incorporating an additive into the print medium comprises homogenously incorporating the additive into the print medium.
10. A print medium comprising an additive selected from the group consisting of at least one of 4-morpholineethane-sulfonic acid; bis(2-hydroxyethyl)imino-tris(hydroxymethyl)methane; N-(2-acetamido)imino-diacetic acid; N-(2-acetamido)-2-aminoethanesulfonic acid; piperazine-N,N-bis(2-ethanesulfonic acid); beta-hydroxy-4-morpholinepropanesulfonic acid; 1,3-bis(tris(hydroxymethyl)methylamino)-propane; N,N-bis(2-hydroxyethyl)-2-aminoethanesulfonic acid; 4-(N-morpholino)butanesulfonic acid; N-tris(hydroxymethyl )methyl-2-aminoethane sulfonic acid); N-(2-hydroxyethyl)piperazine-N-2-ethanesulfonic acid; N,N-bis(2-hydroxyethyl)-3-amino-2-hydroxypropanesulfonic acid; 4-morpholinepropanesulfonic acid; 3-(N-tris(hydroxymethyl)methylamino)-2-hydroxypropane-sulfonic acid; tris(hydroxymethyl)aminomethane; N-(2-hydroxyethyl)piperazine-N-(2-hydroxypropane-sulfonic acid)); piperazine-N,N-bis(2-hydroxypropanesulfonic acid)); triethanolamine; N-(2-hydroxyethyl)piperazine-N-(3-propanesulfonic acid); N-(tris(hydroxymethyl)methyl)glycine; glycyl-glycine; N,N-bis(2-hydroxyethyl)glycine; N-(2-hydroxyethyl)piperazine-N-(4-butanesulfonic acid); ((2-hydroxy-11-bis(hydroxymethyl)ethyl)amino)-1-propanesulfonic acid; 2-amino-2-methyl-1,3-propanediol; N-tris-(hydroxymethyl)methyl-4-aminobutanesulfonic acid; 3-((1,1-dimethyl-2-hydroxyethyl)amino)-2-hydroxypropanesulfon ic acid; 2-(cyclohexylamino)ethanesulfonic acid; 3-(cyclohexylamino)-2-hydroxy-1-propanesulfonic acid; 2-amino-2-methylpropanol; 3-cyclohexylamino-1-propanesulfonic acid; 4-cyclohexylamino-1-butanesulfonic acid; sodium acetate; or sodium succinate into the print medium.
11. The print medium of claim 10, wherein the additive is in an amount in the print medium from approximately 0.001% by weight to approximately 20% by weight of a total coating formulation of the print medium.
12. A print medium comprising an additive selected from the group consisting of at least one of sodium bicarbonate, sodium carbonate, sodium borate, sodium phosphate, sodium acetate, sodium sulfite, sodium bisulfite, or sodium hydroxide into the print medium.
13. The print medium of claim 12, wherein the additive is in an amount in the print medium from approximately 0.001% by weight to approximately 20% by weight of a total coating formulation of the print medium.
14. A method of reducing bronzing in a printed image, comprising:
raising a pH of the print medium by incorporating an additive into the print medium; and
applying an image onto the print medium.
15. The method of claim 14, wherein raising a pH of the print medium comprises incorporating an inorganic or organic base into a photographic paper.
16. The method of claim 14, wherein raising a pH of the print medium comprises incorporating at least one of sodium bicarbonate, sodium carbonate, sodium borate, sodium phosphate, sodium acetate, sodium sulfite, sodium bisulfite, or sodium hydroxide into the print medium.
17. The method of claim 14, wherein raising a pH of the print medium comprises incorporating at least one of 4-morpholineethane-sulfonic acid; bis(2-hydroxyethyl)imino-tris(hydroxymethyl)methane; N-(2-acetamido)imino-diacetic acid; N-(2-acetamido)-2-aminoethanesulfonic acid; piperazine-N,N-bis(2-ethanesulfonic acid); beta-hydroxy-4-morpholinepropanesulfonic acid; 1,3-bis(tris(hydroxymethyl)methylamino)-propane; N,N-bis(2-hydroxyethyl)-2-aminoethanesulfonic acid; 4-(N-morpholino)butanesulfonic acid; N-tris(hydroxymethyl)methyl-2-aminoethane sulfonic acid); N-(2-hydroxyethyl)piperazine-N-2-ethanesulfonic acid; N,N-bis(2-hydroxyethyl)-3-amino-2-hydroxypropanesulfonic acid; 4-morpholinepropanesulfonic acid; 3-(N-tris(hydroxymethyl)methylamino)-2-hydroxypropane-sulfonic acid; tris(hydroxymethyl)aminomethane; N-(2-hydroxyethyl)piperazine-N-(2-hydroxypropane-sulfonic acid));
piperazine-N,N-bis(2-hydroxypropanesulfonic acid)); triethanolamine; N-(2-hydroxyethyl)piperazine-N-(3-propanesulfonic acid); N-(tris(hydroxymethyl)methyl)glycine; glycyl-glycine; N,N-bis(2-hydroxyethyl)glycine; N-(2-hydroxyethyl)piperazine-N-(4-butanesulfonic acid); ((2-hydroxy-1,1-bis(hydroxymethyl)ethyl)amino)-1-propanesulfonic acid; 2-amino-2-methyl-1,3-propanediol; N-tris-(hydroxymethyl)methyl-4-aminobutanesulfonic acid; 3-((11,1-dimethyl-2-hydroxyethyl)amino)-2-hydroxypropanesulfonic acid; 2-(cyclohexylamino)ethanesulfonic acid; 3-(cyclohexylamino)-2-hydroxy-1-propanesulfonic acid; 2-amino-2-methylpropanol; 3-cyclohexylamino-1-propanesulfonic acid; 4-cyclohexylamino-1-butanesulfonic acid; sodium acetate; or sodium succinate into the print medium.
18. The method of claim 14, wherein raising a pH of the print medium comprises incorporating from approximately 0.001% to approximately 20% by weight of the additive into the print medium.
19. The method of claim 14, wherein applying an image onto the print medium comprises applying a dye-based ihkjet ink onto the print medium.
20. A print medium having reduced bronzing, comprising:
at least one additive incorporated into the print medium, wherein the at least one additive is an organic base or inorganic base that increases a pH of the print medium.
21. The print medium of claim 20, wherein the at least one additive is selected from the group consisting of sodium bicarbonate, sodium carbonate, sodium borate, sodium phosphate, sodium acetate, sodium sulfite, sodium bisulfite, and sodium hydroxide.
22. The print medium of claim 20, wherein the at least one additive is selected from the group consisting of 4-morpholineethane-sulfonic acid; bis(2-hydroxyethyl)imino-tris(hydroxymethyl)methane; N-(2-acetamido)imino-diacetic acid; N-(2-acetamido)-2-aminoethanesulfonic acid; piperazine-N,N-bis(2-ethanesulfonic acid); beta-hydroxy-4-morpholinepropanesulfonic acid; 1,3-bis(tris(hydroxymethyl)methylamino)-propane; N,N-bis(2-hydroxyethyl)-2-aminoethanesulfonic acid; 4-(N-morpholino)butanesulfonic acid; N-tris(hydroxymethyl)methyl-2-aminoethane sulfonic acid); N-(2-hydroxyethyl)piperazine-N-2-ethanesulfonic acid; N,N-bis(2-hydroxyethyl)-3-amino-2-hydroxypropanesulfonic acid; 4-morpholinepropanesulfonic acid; 3-(N-tris(hydroxymethyl)methylamino)-2-hydroxypropane-sulfonic acid; tris(hydroxymethyl)aminomethane; N-(2-hydroxyethyl)piperazine-N-(2-hydroxypropane-sulfonic acid)); piperazine-N,N-bis(2-hydroxypropanesulfonic acid)); triethanolamine; N-(2-hydroxyethyl)piperazine-N-(3-propanesulfonic acid); N-(tris(hydroxymethyl)methyl)glycine; glycyl-glycine; N,N-bis(2-hydroxyethyl)glycine; N-(2-hydroxyethyl)piperazine-N-(4-butanesulfonic acid); ((2-hydroxy-1,1-bis(hydroxymethyl)ethyl)amino)-1-propanesulfonic acid; 2-amino-2-methyl-1,3-propanediol; N-tris-(hydroxymethyl)methyl-4-aminobutanesulfonic acid; 3-((1,1-dimethyl-2-hydroxyethyl)amino)-2-hydroxypropanesulfonic acid; 2-(cyclohexylamino)ethanesulfonic acid; 3-(cyclohexylamino)-2-hydroxy-1-propanesu Ifonic acid; 2-amino-2-methylpropanol; 3-cyclohexylamino-1-propanesulfonic acid; 4-cyclohexylamino-1-butanesulfonic acid; sodium acetate; and sodium succinate.
23. The print medium of claim 20, wherein the at least one additive is present in the print medium in an amount from approximately 0.001% to approximately 20% by weight of a total coating formulation.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A slurry system for an improved low-K oxidecopper chemical mechanical polishing (CMP) process with low solids content to avoid copper damascene sidewall erosion and to reduce CMP impact forces comprising:
an aqueous dispersion comprising particles, said particles comprising a first material having an elastomeric polymer outer surface, said first material surrounding a core comprising a second material, said second material different from said first material, said particles in said aqueous dispersion capable of exhibiting elastic behavior during the CMP process, said elastomeric polymer only on said particles in said aqueous dispersion;
said aqueous dispersion having a pH of between about 7.0 and about 10.0, and,
wherein said aqueous dispersion has a solids content of said particles of between about 0.5 and about 6.5 weight percent of the total weight of the aqueous dispersion.
2. The slurry system of claim 1, wherein the particles comprise a thermoplastic material.
3. The slurry system of claim 1, wherein the elastomeric polymer outer surface comprises a material selected from the group consisting of polyurethanes, neoprenes, silicones, fluorosilicones, fluorocarbon polymers, polysulfones, acrylic resins, polyacetals, saturated polyesters, polyamides, polyimides, polypropyilenes, phenol resins, urea resins, melamine resins, and epoxy resins.
4. The slurry system of claim 1, wherein the particles comprise an elastomeric polymer coating over a metal oxide.
5. The slurry system of claim 1, wherein the particles have a mean particle diameter of from about 20 nanometers to about 500 nanometers.
6. The slurry system of claim 1, wherein the particles have a mean particle diameter of from about 50 nanometers to about 200 nanometers.
7. The slurry system of claim 1, wherein the slurry system further comprises an additive selected from the group consisting of ammonium hydroxide (NH4OH), ammonia (NH3), and tetra methyl ammonium hydroxide (TMAH).
8. The slurry system of claim 1, further comprising a surfactant at about 0.01 weight percent to about 0.5 weight percent.
9. The slurry system of claim 8, wherein the surfactant is selected from the group consisting of fatty acids and their salts.
10. The slurry system of claim 9, wherein the surfactant includes at least one of a detergent and a soap.
11. The slurry system of claim 1, wherein the elastomeric polymer outer surface surrounds a core comprising an inorganic material.
12. A slurry system for an improved low-K oxidecopper chemical mechanical polishing (CMP) process to reduce copper damascene sidewall erosion comprising:
an alkaline aqueous dispersion comprising abrasive particles, said abrasive particles consisting essentially of particles comprising a first material having an elastomeric polymer outer surface, said first material surrounding a core comprising a second material, said second material different from said first material, said abrasive particles in said alkaline aqueous dispersion capable of exhibiting elastic behavior during the CMP process, said elastomeric polymer only on said particles in said alkaline aqueous dispersion.
13. The slurry system of claims 12 wherein said alkaline aqueous dispersion has a pH of between about 7.0 and about 10.0.
14. The slurry system of claims 12 wherein said alkaline aqueous dispersion has a solids content of said particles of between about 0.5 and about 6.5 weight percent of the total weight of the aqueous dispersion.
15. The slurry system of claim 12, wherein the particles comprise a thermoplastic material.
16. The slurry system of claim 12, wherein the elastomeric polymer outer surface comprises a material selected from the group consisting of polyurethanes, neoprenes, silicones, fluorosilicones, fluorocarbon polymers, polysulfones, acrylic resins, polyacetals, saturated polyesters, polyamides, polyimides, polypropylenes, phenol resins, urea resins, melamine resins, and epoxy resins.
17. The slurry system of claim 12, wherein the particles comprise an elastomeric polymer coating over a metal oxide.
18. The slurry system of claim 12, wherein the abrasive particles have a mean particle diameter of from about 20 nanometers to about 500 nanometers.
19. The slurry system of claim 12, wherein the abrasive particles have a mean particle diameter of from about 50 nanometers to about 200 nanometers.
20. The slurry system of claim 12, wherein the slurry system further comprises an additive selected from the group consisting of ammonium hydroxide (NH4OH), ammonia (NH3), and tetra methyl ammonium hydroxide (TMAH).
21. The slurry system of claim 12, further comprising a surfactant at about 0.01 weight percent to about 0.5 weight percent.
22. The slurry system of claim 21, wherein the surfactant is selected from the group consisting of fatty acids and their salts.
23. The slurry system of claim 12, wherein the elastomeric polymer outer surface surrounds a core comprising an inorganic material.
24. A slurry system for an improved low-K oxidecopper chemical mechanical polishing (CMP) process to reduce copper damascene sidewall erosion comprising:
an alkaline aqueous dispersion comprising abrasive particles, said abrasive particles consisting essentially of particles comprising a first material having an elastomeric polymer outer surface, said first material surrounding a core comprising a second material, said second material different from said first material, said abrasive particles in said alkaline aqueous dispersion capable of exhibiting elastic behavior during the CMP process, said elastomeric polymer only on said particles in said alkaline aqueous dispersion;
wherein said alkaline aqueous dispersion has a pH of between about 7.0 and about 10.0, and,
wherein said alkaline aqueous dispersion has a solids content of said particles of between about 0.5 and about 6.5 weight percent of the total weight of the aqueous dispersion.
25. The slurry system of claim 24, wherein the particles comprise a thermoplastic material.
26. The slurry system of claim 24, wherein the elastomeric polymer outer surface comprises a material selected from the group consisting of polyurethanes, neoprenes, silicones, fluorosilicones, fluorocarbon polymers, polysulfones, acrylic resins, polyacetals, saturated polyesters, polyamides, polyimides, polypropylenes, phenol resins, urea resins, melamine resins, and epoxy resins.
27. The slurry system of claim 24, wherein the abrasive particles comprise an elastomeric polymer coating over a metal oxide.
28. The slurry system of claim 24, wherein the abrasive particles have a mean particle diameter of from about 20 nanometers to about 500 nanometers.
29. The slurry system of claim 24, wherein the slurry system further comprises an additive selected from the group consisting of ammonium hydroxide (NH4OH), ammonia (NH3), and tetra methyl ammonium hydroxide (TMAH).
30. The slurry system of claim 24, further comprising a surfactant selected from the group consisting of fatty acids and their salts.
31. The slurry system of claim 24, further comprising a surfactant at about 0.01 weight percent to about 0.5 weight percent.
32. The slurry system of claim 31, wherein the surfactant is selected from the group consisting of fatty acids and their salts.
33. The slurry system of claim 24, wherein the elastomeric polymer outer surface surrounds a core comprising an inorganic material.