What is claimed is:
1. A method of forming an interlayer dielectric on a semiconductor device, said method comprising the steps of:
depositing a first insulating layer comprising phosphorous on said semiconductor device;
depositing a second insulating layer on said first insulating layer, said second insulating layer being denser than said first insulating layer; and
increasing the planarity of said second insulating layer using chemical mechanical polishing.
2. The method of claim 1 further comprising a step of sputter etching said first insulating layer to increase the conformality of said first insulating layer by redistributing a substantial amount of the material of said first insulating layer.
3. The method of claim 1 wherein said first insulating layer is undensified.
4. The method of claim 1 further comprising a step of depositing a layer of silicon nitride prior to the step of depositing said first insulating layer.
5. A method of forming an interlayer dielectric between a layer of semiconductor devices and layer of interconnects, said method comprising the steps of:
depositing a first oxide layer comprising phosphorous;
depositing a second oxide layer using plasma enhanced chemical vapor deposition, said second oxide layer being denser than said first oxide layer; and
increasing the planarity of said second oxide layer using chemical mechanical polishing.
6. The method of claim 5 wherein said second oxide layer is undoped.
7. The method of claim 5 further comprising a step of densifying said first oxide layer prior to the step of depositing said second oxide layer.
8. The method of claim 5 wherein the thickness of said first oxide layer is less than 5,000 Angstroms and the thickness of said second oxide layer is greater than 5,000 Angstroms prior to the step of increasing the planarity of said second oxide layer.
9. The method of claim 5 further comprising the steps of:
forming an opening in said first and second oxide layers;
depositing a conductive material into said opening and onto said second oxide layer; and
polishing said conductive material from said second oxide layer to form a conductive filled opening.
10. The method of claim 5 wherein said first oxide layer is forming using plasma enhanced chemical vapor deposition, said method further comprising a step of sputter etching said first oxide layer to increase the conformality of said first oxide layer by redistributing a substantial amount of the material of said first oxide layer.
11. A method of forming an interlayer dielectric between a layer of semiconductor devices and layer of interconnects, said method comprising the steps of:
depositing a phosphorous doped oxide layer with a thickness of less than 5,000 A using plasma enhanced chemical vapor deposition;
sputter etching said phosphorous doped oxide layer to increase the conformality of said phosphorous doped oxide layer by redistributing a substantial amount of the material of said phosphorous doped oxide layer;
depositing an undoped oxide layer with a thickness of greater than 5,000 A using plasma enhanced chemical vapor deposition, said undoped oxide layer being denser than said phosphorous doped oxide layer;
increasing the planarity of said phosphorous doped oxide layer using chemical mechanical polishing;
forming an opening in said undoped and phosphorous doped oxide layers;
depositing a conductive material into said opening and onto said undoped oxide layer; and
polishing said conductive material from said undoped oxide layer to form a conductive filled opening.
12. An interlayer dielectric between a layer of semiconductor devices and layer of interconnects comprising:
a planarized insulating layer; and
an unplanarized insulating layer comprising phosphorous between said planarized insulating layer and said semiconductor devices, said unplanarized insulating layer being less dense than said planarized insulating layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A saw blade comprising:
a flat, circular disc having a peripheral outer edge and a center hole;
a plurality of circumferentially-spaced teeth each having a cutting edge and projecting radially outwardly from the peripheral outer edge;
a first group of the cutting edges defining a first circumferential width between each adjacent pair of the cutting edges in the first group;
a second group of the cutting edges defining a second circumferential width between each adjacent pair of the cutting edges in the second group; the second circumferential width differing from the first circumferential width; and
a third group of cutting edges defining a third circumferential width as the distance between adjacent cutting edges in the third group; the third circumferential width differing from the first and second circumferential widths.
2. The saw blade of claim 1 wherein the first group includes five cutting edges, the second group includes three cutting edges, and the third group includes two cutting edges.
3. The saw blade of claim 2 wherein the disc is divided into a first half and a second half with the first, second and third groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
4. The saw blade of claim 2 wherein the first group includes a first cuffing edge and a last cutting edge defining therebetween a first group circumferential width of approximately fifty-six degrees; the second group includes a first cutting edge and a last cutting edge defining therebetween a second group circumferential width of approximately forty degrees; and the third group includes a first cutting edge and a last cutting edge defining therebetween a third group circumferential width of approximately twenty-five degrees.
5. The saw blade of claim 4 wherein the disc is divided into a first half and a second half with the first, second and third groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
6. The saw blade of claim 5 wherein at least three circumferential spaces are provided respectively between at least three of the first and second groups, the second and third groups, and the third and first groups, and wherein a first circumferential space is of approximately a fourteen-degree circumferential width, a second circumferential space is of approximately a twenty-degree circumferential width and a third circumferential space is of approximately a twenty-five-degree circumferential width.
7. The saw blade of claim 2 wherein the first group includes a first cutting edge and a last cutting edge defining therebetween a first group circumferential width ranging from fifty-four degrees to fifty-eight degrees, inclusive; the second group includes a first cutting edge and a last cutting edge defining therebetween a second group circumferential width ranging from thirty-eight degrees to forty-two degrees, inclusive; and the third group includes a first cutting edge and a last cutting edge defining therebetween a third group circumferential width ranging from twenty-three degrees to twenty-seven degrees, inclusive.
8. The saw blade of claim 7 wherein the disc is divided into a first half and a second half with the first, second and third groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
9. The saw blade of claim 8 wherein at least three circumferential spaces are provided respectively between at least three of the first and second groups, the second and third groups, and the third and first groups, and wherein a first circumferential space having a circumferential width ranging from twelve degrees to sixteen degrees, inclusive, a second circumferential space having a circumferential width ranging from eighteen degrees to twenty-two degrees, inclusive, and a third circumferential space having a circumferential width ranging from twenty-three degrees to twenty-seven degrees, inclusive
10. The saw blade of claim 1 further comprising a fourth group of cutting edges defining a fourth circumferential width between each adjacent pair of the cutting edges in the fourth group; the fourth circumferential width differing from the first, second and third circumferential widths.
11. The saw blade of claim 10 wherein the first group includes nine cutting edges, the second group includes seven cutting edges, the third group includes five cutting edges, and the fourth group includes four cutting edges.
12. The saw blade of claim 11 wherein the disc is divided into a first half and a second half with the first, second, third and fourth groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
13. The saw blade of claim 11 wherein the first group includes a first cutting edge and a last cutting edge defining therebetween a first group circumferential width of approximately thirty-six degrees; the second group includes a first cutting edge and a last cutting edge defining therebetween a second group circumferential width of approximately thirty-six degrees; the third group includes a first cutting edge and a last cutting edge defining therebetween a third group circumferential width of approximately thirty-six degrees; and the fourth group includes a first cutting edge and a last cutting edge defining therebetween a fourth group circumferential width of approximately forty-five degrees.
14. The saw blade of claim 13 wherein the disc is divided into a first half and a second half with the first, second, third and fourth groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
15. The saw blade of claim 14 wherein between the first and second groups in both sets there is a first circumferential space of an approximately four-and-a-half-degree circumferential width; between the second and third groups in both sets there is a second circumferential space of an approximately six-degree circumferential width; between the third and fourth groups in both sets there is a third circumferential space of an approximately nine-degree circumferential width; and between the fourth group in each set and the first group in the respective other set there is a fourth circumferential space of an approximately seven-and-a-half-degree circumferential width.
16. The saw blade of claim 11 wherein the first group includes a first cutting edge and a last cutting edge defining therebetween a first group circumferential width ranging from thirty-four degrees to thirty-eight degrees, inclusive; the second group includes a first cutting edge and a last cutting edge defining therebetween a second group circumferential width ranging from thirty-four degrees to thirty-eight degrees, inclusive; the third group includes a first cutting edge and a last cutting edge defining therebetween a third group circumferential width ranging from thirty-four degrees to thirty-eight degrees; and the fourth group includes a first cutting edge and a last cutting edge defining therebetween a fourth group circumferential width ranging from forty-three degrees to forty-seven degrees, inclusive.
17. The saw blade of claim 16 wherein the disc is divided into a first half and a second half with the first, second, third and fourth groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
18. The saw blade of claim 17 wherein between the first and second groups in both sets there is a first circumferential space having a circumferential width ranging from two-and-a-half degrees to six-and-a-half degrees; between the second and third groups in both sets there is a second circumferential space having a circumferential width ranging from four degrees to eight degrees; between the third and fourth groups in both sets there is a third circumferential space having a circumferential width ranging from seven degrees to eleven degrees; and between the fourth group in each set and the first group in the respective other set there is a fourth circumferential space having a circumferential width ranging from five-and-a-half to nine-and-a-half degrees, inclusive.
19. The saw blade of claim 10 wherein the first group includes twelve cutting edges, the second group includes eight cutting edges, the third group includes twelve cutting edges, and the fourth group includes three cutting edges.
20. The saw blade of claim 19 wherein the disc is divided into a first half and a second half with the first, second, third and fourth groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
21. The saw blade of claim 19 wherein the first group includes a first cutting edge and a last cutting edge defining therebetween a first group circumferential width of approximately thirty-eight-and-a-half degrees; the second group includes a first cutting edge and a last cutting edge defining therebetween a second group circumferential width of approximately thirty-two-and-a-half degrees; the third group includes a first cutting edge and a last cutting edge defining therebetween a third group circumferential width of approximately sixty-six degrees; and the fourth group includes a first cutting edge and a last cutting edge defining therebetween a fourth group circumferential width of approximately twenty-one-and-a-half degrees.
22. The saw blade of claim 21 wherein the disc is divided into a first half and a second half with the first, second, third and fourth groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
23. The saw blade of claim 22 wherein between the first and second groups in both sets there is a first circumferential space of an approximately three-and-a-half-degree circumferential width; between the second and third groups in both sets there is a second circumferential space of an approximately four-and-a-half-degree circumferential width; between the third and fourth groups in both sets there is a third circumferential space of an approximately six-degree circumferential width; and between the fourth group in each set and the first group in the respective other set there is a fourth circumferential space of an approximately seven-and-a-half-degree circumferential width.
24. The saw blade of claim 19 wherein the first group includes a first cutting edge and a last cutting edge defining therebetween a first group circumferential width ranging from thirty-six-and-a-half degrees to forty-and-a-half degrees, inclusive; the second group includes a first cutting edge and a last cutting edge defining therebetween a second group circumferential width ranging from thirty-and-a-half to thirty-four-and-a-half degrees, inclusive; the third group includes a first cutting edge and a last cutting edge defining therebetween a third group circumferential width ranging from sixty-four degrees to sixty-eight degrees, inclusive; and the fourth group includes a first cutting edge and a last cutting edge defining therebetween a fourth group circumferential width ranging from nineteen-and-a-half degrees to twenty-three-and-a-half degrees, inclusive.
25. The saw blade of claim 24 wherein the disc is divided into a first half and a second half with the first, second, third and fourth groups of cutting edges all being within the first half and defined as a first set, and the second half including a second set that is a copy exact of the first set positioned in a diametrically opposite manner.
26. The saw blade of claim 25 wherein between the first and second groups in both sets there is a first circumferential space having a circumferential width ranging from one-and-a-half degrees to five-and-a-half degrees, inclusive; between the second and third groups in both sets there is a second circumferential space having a circumferential width ranging from two-and-a-half degrees to six-and-a-half degrees, inclusive; between the third and fourth groups in both sets there is a third circumferential space having a circumferential width ranging from four degrees to eight degrees, inclusive; and between the fourth group in each set and the first group in the respective other set there is a fourth circumferential space having a circumferential width ranging from five-and-a-half degrees to nine-and-a-half degrees, inclusive.
27. A saw blade comprising:
a flat, circular disc having a peripheral outer edge and a center hole, the disc being divided into a first half and a second half, each half being a copy exact of the other half positioned in a diametrically opposite manner;
a plurality of circumferentially-spaced teeth each having a cutting edge and projecting radially outwardly from the peripheral outer edge;
a first group in each half having five cutting edges including a first cutting edge and a last cutting edge defining therebetween a first group circumferential width of approximately fifty-six degrees;
a second group in each half having three cutting edges including a first cutting edge and a last cutting edge defining therebetween a second group circumferential width of approximately forty degrees;
a third group in each half having two cutting edges including a first cutting edge and a last cutting edge defining therebetween a third group circumferential width of approximately twenty-five degrees;
a first circumferential space being between the first and second groups in each half and having an approximately fourteen-degree circumferential width;
a second circumferential space being between the second and third groups in each half and having an approximately twenty-degree circumferential width; and
a third circumferential space being between the third group in each half and the first group in the respective other half and having an approximately twenty-five-degree circumferential width.
28. A saw blade comprising:
a flat, circular disc having a peripheral outer edge and a center hole, the disc being divided into a first half and a second half, each half being a copy exact of the other half positioned in a diametrically opposite manner;
a plurality of circumferentially-spaced teeth each having a cutting edge and projecting radially outwardly from the peripheral outer edge;
a first group in each half having nine cutting edges including a first cutting edge and a last cutting edge defining a first group circumferential width therebetween which is approximately thirty-six degrees;
a second group in each half having seven cutting edges including a first cutting edge and a last cutting edge defining a second group circumferential width therebetween which is approximately thirty-six degrees;
a third group in each half having five cutting edges including a first cutting edge and a last cutting edge defining a second group circumferential width therebetween which is approximately thirty-six degrees;
a fourth group in each half having four cutting edges defining a second group circumferential width therebetween which is approximately forty-five degrees;
a first circumferential space being between the first and second groups in each half and having an approximately four-and-a-half-degree circumferential width;
a second circumferential space being between the second and third groups in each half and having an approximately six-degree circumferential width;
a third circumferential space being between the third and fourth groups in each half and having an approximately nine-degree circumferential width; and
a fourth circumferential space being between the fourth group in each half and the first group in the respective other half and having an approximately seven-and-a-half-degree circumferential width.
29. A saw blade comprising:
a flat, circular disc having a peripheral outer edge and a center hole, the disc being divided into a first half and a second half, each half being a copy exact of the other half positioned in a diametrically opposite manner;
a plurality of circumferentially-spaced teeth each having a cutting edge and projecting radially outwardly from the peripheral outer edge;
a first group in each half having twelve cutting edges including a first cutting edge and a last cutting edge defining a first group circumferential width therebetween which is approximately thirty-eight-and-a-half degrees;
a second group in each half having eight cutting edges including a first cutting edge and a last cutting edge defining a second group circumferential width therebetween which is approximately thirty-two-and-a-half degrees;
a third group in each half having twelve cutting edges including a first cutting edge and a last cutting edge defining a second group circumferential width therebetween which is approximately sixty-six degrees;
a fourth group in each half having three cutting edges defining a second group circumferential width therebetween which is approximately twenty-one-and-a-half degrees;
a first circumferential space being between the first and second groups in each half and having an approximately three-and-a-half-degree circumferential width;
a second circumferential space being between the second and third groups in each half and having an approximately four-and-a-half-degree circumferential width;
a third circumferential space being between the third and fourth groups in each half and having an approximately six-degree circumferential width; and
a fourth circumferential space being between the fourth group in each half and the first group in the respective other half and having an approximately seven-and-a-half-degree circumferential width.