1460735753-375f4058-6a04-42ed-9a7f-596ab3441d41

1. A method for manufacturing an electronic device having an element including an insulating metal oxide film serving as a ferroelectric film or a high dielectric constant film,
wherein in a cleaning step conducted after a step of forming the insulating metal oxide film, dry cleaning is used such that the ferroelectric film or the high dielectric constant film or a periphery region thereof does not directly contact water, and
after the cleaning step, heat treatment is conducted at a temperature at which water remaining near the element is diffused to the ferroelectric film or the high dielectric constant film.
2. A method for manufacturing an electronic device having an element including an insulating metal oxide film serving as a ferroelectric film or a high dielectric constant film, comprising the step of:
forming an interlayer insulating film so as to cover the element after formation of the element,
wherein in a cleaning step conducted after a step of forming the interlayer insulating film, dry cleaning is used such that the ferroelectric film or the high dielectric constant film or a periphery region thereof does not directly contact water, and
after the cleaning step, heat treatment is conducted at a temperature at which water remaining near the element is diffused to the ferroelectric film or the high dielectric constant film.
3. A method for manufacturing an electronic device having an element including an insulating metal oxide film serving as a ferroelectric film or a high dielectric constant film,
wherein in a cleaning step conducted after a step of forming the insulating metal oxide film, a cleaning solution containing substantially no water is used such that the ferroelectric film or the high dielectric constant film or a periphery region thereof does not directly contact water, and
after the cleaning step, heat treatment is conducted at a temperature at which water remaining near the element is diffused to the ferroelectric film or the high dielectric constant film.
4. A method for manufacturing an electronic device having an element including an insulating metal oxide film serving as a ferroelectric film or a high dielectric constant film, comprising the step of:
forming an interlayer insulating film so as to cover the element after formation of the element,
wherein in a cleaning step conducted after a step of forming the interlayer insulating film, a cleaning solution containing substantially no water is used such that the ferroelectric film or the high dielectric constant film or a periphery region thereof does not directly contact water, and
after the cleaning step, heat treatment is conducted at a temperature at which water remaining near the element is diffused to the ferroelectric film or the high dielectric constant film.
5. A method for manufacturing an electronic device having an element including an insulating metal oxide film serving as a ferroelectric film or a high dielectric constant film,
wherein in a cleaning step conducted after a step of forming the insulating metal oxide film, at least one selected from the group consisting of organic cleaning using an organic solvent, Ar aerosol cleaning, CO2 cleaning, UV cleaning, and cleaning using CO2 in a supercritical state is used such that the ferroelectric film, the high dielectric constant film or a periphery region thereof does not directly contact water,
ashing is not used in the cleaning step, and
after the cleaning step, heat treatment is conducted at a temperature at which water remaining near the element is diffused to the ferroelectric film or the high dielectric constant film.
6. A method for manufacturing an electronic device having an element including an insulating metal oxide film serving as a ferroelectric film or a high dielectric constant film, comprising the step of:
forming an interlayer insulating film so as to cover the element after formation of the element,
wherein in a cleaning step conducted after a step of forming the interlayer insulating film, at least one selected from the group consisting of organic cleaning using an organic solvent, Ar aerosol cleaning, CO2 cleaning, UV cleaning, and cleaning using CO2 in a supercritical state is used such that the ferroelectric film or the high dielectric constant film or a periphery region thereof does not directly contact water,
ashing is not used in the cleaning step, and
after the cleaning step, heat treatment is conducted at a temperature at which water remaining near the element is diffused to the ferroelectric film or the high dielectric constant film.
7. The method according to claim 1, wherein the element is at least partially exposed in the cleaning step.
8. The method according to claim 1, wherein the dry cleaning is Ar aerosol cleaning, CO2 cleaning, UV cleaning, or cleaning using CO2 in a supercritical state.
9. The method according to claim 2, wherein the interlayer insulating film is at least partially exposed in the cleaning step.
10. The method according to claim 2, wherein the dry cleaning is Ar aerosol cleaning, CO2 cleaning, UV cleaning, or cleaning using CO2 in a supercritical state.
11. The method according to claim 3, wherein the element is at least partially exposed in the cleaning step.
12. The method according to claim 3, wherein the cleaning solution is an organic solvent.
13. The method according to claim 4, wherein the interlayer insulating film is at least partially exposed in the cleaning step.
14. The method according to claim 4, wherein the cleaning solution is an organic solvent.
15. The method according to claim 5, wherein the element is at least partially exposed in the cleaning step.
16. The method according to claim 5, wherein the interlayer insulating film is at least partially exposed in the cleaning step.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A cleaning device for cleaning a carpet having face yarns that extend over a distance of several millimeters from a generally planar backings to define a carpet surface, comprising:
an oscillator unit, including:
an oscillator;
an oscillation space that is at least partially defined by or accommodates at least part of the oscillator, and that is accessible through a jet opening via which ambient fluid is alternatingly drawn into the oscillation space and expelled from the oscillation space during operation of the oscillator;
a nozzle, including
a support structure configured to support the nozzle against the carpet, including a carpet surface penetrator that defines said jet opening and protrudes from the support structure such that, in a supported condition of the nozzle in which the support structure is supported against a carpet, the carpet surface penetrator penetrates the carpet surface and the jet opening is disposed at least partially below the support structure and the carpet surface.
2. The cleaning device according to claim 1, wherein, in the supported condition of the nozzle against the carpet, the penetrator penetrates the carpet surface and the jet opening is disposed substantially below the carpet surface.
3. The cleaning device according to claim 1, wherein, in the supported condition of the nozzle against the carpet, the penetrator penetrates the carpet surface and the jet opening is disposed in between 0.5 and 2 mm below the carpet surface.
4. The cleaning device according to claim 1, wherein the support structure includes a generally planar, external support surface for supporting the nozzle against the carpet surface, and wherein at least part of the penetrator protrudes outwardly from the external support surface, such that the jet opening defined by the penetrator is at least partially disposed outward of the support surface.
5. The cleaning device according to claim 4, wherein at least part of the penetrator protrudes outwardly from the external support surface, such that the jet opening defined by the penetrator is substantially disposed outward of the support surface, in particular at a distance in the range of 0.5-2 mm there from.
6. The cleaning device according to claim 1, wherein the oscillation space defines a jet channel at an end of which the jet opening is provided, and
wherein the jet channel, at the jet opening, extends outwardly in a jet direction (J).
7. The cleaning device according to claim 6, wherein the jet direction (J), in the supported condition of the nozzle against the carpet, faces away from the carpet’s backing.
8. The cleaning device according to claim 7, wherein the jet direction (J), in the supported condition of the nozzle against the carpet, includes an angle in the range of 15-45 degrees with the carpet’s backing.
9. The cleaning device according to claim 6, wherein the jet channel, at the jet opening, is defined by a jet channel wall having a first section and a second section,
wherein, in the supported condition of the nozzle against the carpet, the first section is proximal to the carpet’s backing while the second section is distal to the carpet’s backing, and
wherein the second section extends beyond the first section in the jet direction (J).
10. The cleaning device according to claim 9, wherein the second section extends 0.5-5 mm beyond the first section.
11. The cleaning device according to claim 1, configured such that, during operation, the following criterion is achievable:
f
\xb7
d

v

\u2264
1

,
wherein \u0192 is the frequency of the oscillator, d is a characteristic dimension of the jet opening, and v is an average fluid velocity at the jet opening when fluid is expelled from the oscillation space.
12. The cleaning device according to claim 1, further comprising:
a fluid suction unit, including:
a dirt discharge duct having a suction end that, in the supported condition of the nozzle against the carpet, faces the carpet;
a fluid flow generator, operably connected to the dirt discharge duct, and configured to generate a fluid flow through the dirt discharge duct by effecting under pressure at the suction end;
including the jet opening of the oscillator unit faces the suction end of the dirt discharge duct, such that, during operation, fluid expelled from the oscillation space through the jet opening is effectively injected into the generated fluid flow at the suction end and entrained therein.

1460735746-47a6001e-9382-40ae-a69b-1abbf4ebdd8f

1. A method for digital halftoning by predicting an appearance of a rendering by a printer of a digital halftone representation of a continuous-tone image, the method comprising:
using a processor, calculating a predicted absorptance value of a dot of a rendered halftone of the digital halftone representation, the dot corresponding to a pixel of the digital halftone representation, wherein the predicted absorptance value is based on a configuration of pixel values of pixels in an immediate neighborhood of the pixel, and on a weighted contribution of a pixel value of each pixel in an outer neighborhood of the pixel; and,
using the processor, creating a digital halftone for rendering by the printer.
2. The method of claim 1, wherein the creating of the digital halftone includes using a halftoning technique selected from a group of halftoning techniques consisting of digital binary search, designing a threshold mask for use in screening, and error diffusion.
3. The method of claim 2, wherein the halftoning technique comprises:
providing an initial digital halftone representation of the continuous-tone image;

selecting a pixel from a plurality of pixels in a halftone region of the initial digital halftone representation;
for each selected pixel:
performing the calculating of the predicted absorptance value of the dot of the rendered halftone that corresponds to the selected pixel;
calculating an evaluation criterion value indicative of a similarity between the predicted absorptance values and corresponding continuous-tone pixel values in a corresponding region of the continuous-tone image; and
performing an enhancement procedure including modifying the pixel values of at least one pixel of the halftone region, recalculating the predicted absorptance values, calculating a change in the evaluation criterion value, and replacing the pixel values with the modified pixel values when the calculated change in the evaluation criterion is indicative of enhanced similarity between the recalculated predicted absorptance values and the corresponding continuous-tone pixel values.
4. The method of claim 3, wherein calculating the change in the evaluation criterion value comprises calculating a term based on a statistic of variation of the predicted absorptance value.
5. The method of claim 1, wherein the immediate neighborhood is centered on the selected pixel and wherein the outer neighborhood comprises a single-pixel-wide band of pixels that surrounds the immediate neighborhood.
6. The method of claim 1, wherein a weight of said weighted contribution of a pixel value of each pixel in an outer neighborhood depends on the configuration of pixel values of pixels in the immediate neighborhood.
7. The method of claim 1, wherein a weight of said weighted contribution of a pixel value of each pixel in an outer neighborhood is generated by analysis of an image of a printed halftone that was printed by the printer, the printed halftone comprising a rendering of a plurality of replications of a plurality of configurations of an inner pattern of pixels surrounded by an outer pattern of pixels, the inner pattern being substantially identical to the immediate neighborhood, and the outer pattern being substantially identical to the outer neighborhood.
8. The method of claim 7, wherein said plurality of configurations comprises each inner pattern configuration of a set of all possible configurations of the inner pattern, each inner pattern configuration in combination with each outer pattern configuration of a set of configurations of the outer pattern, the set of configurations of the outer pattern being a subset of all possible configurations of the outer pattern.
9. The method of claim 7, wherein analysis of the image of the printed halftone comprises calculating a statistic of variation of the absorptance of a central dot of each configuration of the plurality of configurations.
10. A non-transitory computer readable medium containing instructions that when executed cause a processor to execute the step of calculating a predicted absorptance value of a dot of a rendered halftone of the digital halftone representation, the dot corresponding to a pixel of the digital halftone representation, wherein the predicted absorptance value is based on a configuration of pixel values of pixels in an immediate neighborhood of the pixel, and on a weighted contribution of a pixel value of each pixel in an outer neighborhood of the pixel.
11. The non-transitory computer readable medium of claim 10, wherein the step of calculating the predicted absorptance value is incorporated in a halftoning technique selected from a group of halftoning techniques consisting of digital binary search, screening, and error diffusion.
12. The non-transitory computer readable medium of claim 10, wherein the halftone technique comprises:
providing an initial digital halftone representation of the continuous-tone image;
selecting a pixel from a plurality of pixels in a halftone region of the initial digital halftone representation;
for each selected pixel:
performing the calculating of the predicted absorptance value of the dot of the rendered halftone that, corresponds to the selected pixel;
calculating an evaluation criterion value indicative of a similarity between the predicted absorptance values and corresponding continuous-tone pixel values in a corresponding region of the continuous-tone image; and
performing an enhancement procedure including modifying the pixel values of at least one pixel of the halftone region, recalculating the predicted absorptance values, calculating a change in the evaluation criterion value, and replacing the pixel values with the modified pixel values when the calculated change in the evaluation criterion is indicative of enhanced similarity between the recalculated predicted absorptance values and the corresponding continuous-tone pixel values.
13. The non-transitory computer readable medium of claim 12, wherein calculating the change in the evaluation criterion value comprises calculating a term based on a statistic of variation of the predicted absorptance value.
14. The non-transitory computer readable medium of claim 10, wherein the immediate neighborhood is centered on the selected pixel and wherein the outer neighborhood comprises a single-pixel-wide band of pixels that surrounds the immediate neighborhood.
15. The non-transitory computer readable medium of claim 10, wherein a weight of said weighted contribution of a pixel value of each pixel in an outer neighborhood depends on the configuration of pixel values of pixels in the immediate neighborhood.
16. The non-transitory computer readable medium of claim 10, wherein a weight of said weighted contribution of a pixel value of each pixel in an outer neighborhood is generated by analysis of an image of a printed halftone that was printed by the printer, the printed halftone comprising a rendering of a plurality of replications of a plurality of configurations of an inner pattern of pixels surrounded by an outer pattern of pixels, the inner pattern being substantially identical to the immediate neighborhood, and the outer pattern being substantially identical to the outer neighborhood.
17. The non-transitory computer readable medium of claim 16, wherein said plurality of configurations comprises each inner pattern configuration of a set of all possible configurations of the inner pattern, each inner pattern configuration in combination with each outer pattern configuration of a set of configurations of the outer pattern, the set of configurations of the outer pattern being a subset of all possible configurations of the outer pattern.
18. The non-transitory computer readable medium of claim 16, wherein analysis of the image of the printed halftone comprises calculating a statistic of variation of the absorptance of a central clot of each configuration of the plurality of configurations.
19. A data processing system comprising:
a processing unit in communication with a computer readable medium, wherein the computer readable medium contains a set of instructions for enhancing a digital halftone representation of a continuous-tone image for printing by a printer, wherein the processing unit is designed to carry out a set of instructions to calculate a predicted absorptance value of a dot of a rendered halftone of the digital halftone representation, the dot corresponding to a pixel of the digital halftone representation, wherein the predicted absorptance value is based on a configuration of pixel values of pixels in an immediate neighborhood of the pixel, and on a weighted contribution of a pixel value of each pixel in an outer neighborhood of the pixel.
20. The system of claim 19, wherein the processing unit is designed to carry out instructions to perform a halftoning technique selected from a group of halftoning techniques consisting of iterative search, designing a threshold mask for use in screening, and error diffusion, the halftoning technique incorporating the calculated predicted absorptance value.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of treating cancer comprising administering a therapeutically effective amount of a pharmaceutical composition comprising a compound of formula (I):
or pharmaceutically acceptable salt thereof, to a cancer patient with hematopoietic tumors of lymphoid lineage wherein
R1 represents a 5- or 6-membered heteroaromatic ring comprising at least one ring heteroatom selected from nitrogen, oxygen, and sulphur, the ring being optionally substituted with at least one substituent selected from C1-C6alkyl, C1-C6alkoxy (each of which may be optionally substituted by at least one substituent selected from halogen, amino, hydroxyl, and trifluoromethyl), halogen, nitro, cyano, \u2014NR5R6, carboxyl, hydroxyl, C2-C6alkenyl, C3-C6cycloalkyl, C1-C6alkoxycarbonyl, C1-C6alkylcarbonyl, C1-C6alkylcarbonylamino, phenylcarbonyl, \u2014S(O)mC1-C6alkyl, \u2014C(O)NR7R8, \u2014SO2NR7aR8a, and an unsaturated 5- to 6-membered ring which may comprise at least one ring heteroatom selected from nitrogen, oxygen, and sulphur, the ring itself being optionally substituted with at least one substituent selected from C1-C6alkyl, C1-C6alkoxy (each of which may be optionally substituted by at least one substituent selected from halogen, amino, hydroxyl, and trifluoromethyl), halogen, nitro, cyano, \u2014NR9R10, carboxyl, hydroxyl, C2-C6alkenyl, C3-C6cycloalkyl, C1-C6alkoxycarbonyl, C1-C6alkylcarbonyl, C1-C6alkylcarbonylamino, phenylcarbonyl, \u2014S(O)nC1-C6alkyl, \u2014C(O)NR11R12, and \u2014SO2NR11aR12a;
m is 0, 1, or 2;
n is 0, 1, or 2;
R2 represents a C1-C4alkyl group optionally substituted with at least one substituent selected from halogen, hydroxyl, and C1-C3alkoxy;
R3 represents halogen;
R4 represents a 5-membered heteroaromatic ring comprising at least one ring heteroatom selected from nitrogen, oxygen, and sulphur, the ring being optionally substituted with at least one substituent selected from C1-C6alkyl, C1-C6alkoxy (each of which may be optionally substituted by at least one substituent selected from halogen, amino, hydroxyl, and trifluoromethyl), halogen, nitro, cyano, \u2014NR13R14, carboxyl, hydroxyl, C2-C6alkenyl, C3-C6cycloalkyl, C1-C4alkoxycarbonyl, C1-C4alkylcarbonyl, C1-C4alkylcarbonylamino, phenylcarbonyl, \u2014S(O)pC1-C4alkyl, \u2014C(O)NR15R16, and \u2014SO2NR15aR16a;
p is 0, 1, or 2;
R5 and R6 each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R5 and R6 together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R7 and R8 each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R7 and R8 together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R7a and R8a each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R7a and R8a together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R9 and R10 each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R9 and R10 together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R11 and R12 each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R11 and R12 together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R11a and R12a each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R11a and R12a together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R13 and R14 each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R13 and R14 together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle;
R15 and R16 each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R15 and R16 together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle; and
R15a and R16a each independently represent hydrogen, C1-C4alkyl, or C3-C6cycloalkyl, or R15a and R16a together with the nitrogen atom to which they are attached form a 4- to 6-membered saturated heterocycle.
2. The method of claim 1, wherein said patient has a cancer selected from acute lymphocytic leukaemia, B-cell lymphoma, and Burketts lymphoma.
3. A compound 2,5-dichloro-4-(5-methyl-1H-pyrrazol-3-ylamino)pyrimidine.